Formation of Ge and GeSi nanocrystals in GeOx/SiO2 multilayers

Author: Volodin V A   Marin D V   Rinnert H   Vergnat M  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.46, Iss.27, 2013-07, pp. : 275305-275311

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