Nanoindentation of polysilicon and single crystal silicon: Molecular dynamics simulation and experimental validation

Author: Goel Saurav     Luo Xichun   Yan Jiwang   Agrawal Anupam  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.47, Iss.27, 2014-07, pp. : 275304-275317

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