Plasma-induced crystallization of silicon nanoparticles

Author： Kramer N J   Anthony R J   Mamunuru M   Aydil E S   Kortshagen U R  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.47, Iss.7, 2014-02, pp. : 75202-75209

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