Impact of CHF3 Plasma Treatment on AlGaN/GaN HEMTs Identified by Low-Temperature Measurement

Author: Yan-Dong Du   Wei-Hua Han   Wei Yan   Fu-Hua Yang  

Publisher: IOP Publishing

ISSN: 0256-307X

Source: Chinese Physics Letters, Vol.31, Iss.4, 2014-04, pp. : 48501-48504

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