Micrograting Displacement Sensor with Integrated Electrostatic Actuation

Author： Bao-Yin Yao Li-Shuang Feng Xiao Wang Wei-Fang Liu Mei-Hua Liu

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.31, Iss.7, 2014-07, pp. : 78501-78504

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