Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe

Author： Seppä Jeremias   Korpelainen Virpi   Bergstrand Sten   Karlsson Helge   Lillepea Lauri   Lassila Antti  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.4, 2014-04, pp. : 44013-44019

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