Scatterometer for characterization of diffractive optical elements

Author： Husu H   Saastamoinen T   Laukkanen J   Siitonen S   Turunen J   Lassila A  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.4, 2014-04, pp. : 44019-44026

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