Residual stress measurement in thin films using a slitting method with geometric phase analysis under a dual beam (FIB/SEM) system

Author： Zhu Ronghua   Xie Huimin   Dai Xianglu   Zhu Jianguo   Jin Aizi  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.9, 2014-09, pp. : 95003-95013

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