A global model study of silane/hydrogen discharges

Author： Danko Stephan   Bluhm Dirk   Bolsinger Valentin   Dobrygin Wladislaw   Schmidt Oliver    

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.5, 2013-10, pp. : 55009-55018

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