Ozone kinetics in low-pressure discharges: vibrationally excited ozone and molecule formation on surfaces

Author: Marinov Daniil   Guerra Vasco   Guaitella Olivier   Booth Jean-Paul   Rousseau Antoine  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.22, Iss.5, 2013-10, pp. : 55018-55031

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