Controlling the electron energy distribution function of electron beam generated plasmas with molecular gas concentration: II. Numerical modeling

Author: Petrov G M   Boris D R   Petrova Tz B   Lock E H   Fernsler R F   Walton S G  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.22, Iss.6, 2013-12, pp. : 65005-65012

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