Dynamics of pulsed reactive RF discharges in response to thin film deposition

Author： Sikimić B   Stefanović I   Denysenko I B   Winter J   Sadeghi N  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.2, 2014-04, pp. : 25010-25021

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