Addendum: Compliant electrostatic chuck based on hairy microstructure (2013 Smart Mater. Struct. 22 015019) and Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces (2013 Smart Mater. Struct. 22 095010)

Author: Saito Shigeki   Kikutani Takeshi   Takahashi Kunio   Takarada Wataru   Soda Fumiaki   Sawai Kenji   Dhelika Radon  

Publisher: IOP Publishing

ISSN: 0964-1726

Source: Smart Materials and Structures, Vol.23, Iss.7, 2014-07, pp. : 79401-79401

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content