Influence of He/D₂ plasma fluxes on the morphology and crystallinity of tungsten coatings

Author： Piip K Paris P Hakola A Bystrov K De Temmerman G Aints M Jõgi I Kozlova J Laan M Likonen J Lissovski A Mändar H

ISSN： 1402-4896

Source： Physica Scripta, Vol.89, Iss.4, 2014-04, pp. : 44009-44012

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