A low-cost infrared absorbing structure for an uncooled infrared detector in a standard CMOS process

Author： Ning Shen   Zhen'an Tang   Jun Yu   Zhengxing Huang  

Publisher： IOP Publishing

ISSN： 1674-4926

Source： Journal of Semiconductors, Vol.35, Iss.3, 2014-03, pp. : 34014-34018

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