Depth Profile Analysis on the Nanometer Scale by a Combination of Electron Probe Microanalysis (EPMA) and Focused Ion Beam Specimen Preparation (FIB)

Author： Richter Silvia Bückins Matthias Aretz Anke Kyrsta Stepan Spähn Michael Mayer Joachim

Publisher： Springer Publishing Company

ISSN： 0026-3672

Source： Microchimica Acta, Vol.145, Iss.1-4, 2004-04, pp. : 187-192

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