Direct Measurement of Electron Beam Scattering in the Low Vacuum SEM

Author： Belkorissat Redouane   Kadoun Ab ed daim   Dupeyrat Marc   Khelifa Brahim   Mathieu Christian  

Publisher： Springer Publishing Company

ISSN： 0026-3672

Source： Microchimica Acta, Vol.147, Iss.3, 2004-06, pp. : 135-139

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