Accurate Determination of Trace Amounts of Oxygen in CrAlN Hard Coatings by a Combination of WDS–EPMA and SIMS

Author: Dreer Sabine   Wilhartitz Peter   Sartory Bernhard   Tessadri Richard   Piplits Kurt   Mayerhofer Karl Emanuel  

Publisher: Springer Publishing Company

ISSN: 0026-3672

Source: Microchimica Acta, Vol.155, Iss.1-2, 2006-09, pp. : 125-128

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