Shave-Off Depth Profiling for Nano-Devices

Author: Nojima Masashi   Toi Masayuki   Maekawa Ayaka   Yamamoto Takeshi   Sakamoto Tetsuo   Owari Masanori   Nihei Yoshimasa  

Publisher: Springer Publishing Company

ISSN: 0026-3672

Source: Microchimica Acta, Vol.155, Iss.1-2, 2006-09, pp. : 219-223

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