Off-Line Metrology on SEM Images Using Gray Scale Morphology

Author: Zois Elias N.   Raptis Ioannis   Anastassopoulos Vassilis  

Publisher: Springer Publishing Company

ISSN: 0026-3672

Source: Microchimica Acta, Vol.155, Iss.1-2, 2006-09, pp. : 323-326

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