Investigations on PECVD boron carbonitride layers by means of ERDA, XPS and nano-indentation measurements

Author: Thamm Thomas   Wett Daniel   Bohne Wolfgang   Strub Erik   Röhrich Jörg   Szargan Rüdiger   Marx Günter   Goedel Werner A.  

Publisher: Springer Publishing Company

ISSN: 0026-3672

Source: Microchimica Acta, Vol.156, Iss.1-2, 2006-11, pp. : 53-56

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