Terahertz Absorption Characteristics of NiCr Film and Enhanced Absorption by Reactive Ion Etching in a Microbolometer Focal Plane Array

Author： Gou Jun   Wang Jun   Li Weizhi   Tai Huiling   Gu Deen   Jiang Yadong  

Publisher： Springer Publishing Company

ISSN： 1866-6892

Source： Journal of Infrared, Millimeter, and Terahertz Waves, Vol.34, Iss.7-8, 2013-08, pp. : 431-436

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