Simultaneous measurement of surface shape and absolute optical thickness of a glass plate by wavelength tuning phase-shifting interferometry

Author: Hibino Kenichi   Kim Yangjin   Lee Sangyu   Kondo Yohan   Sugita Naohiko   Mitsuishi Mamoru  

Publisher: Springer Publishing Company

ISSN: 1340-6000

Source: Optical Review, Vol.19, Iss.4, 2012-07, pp. : 247-253

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