Hydride Vapor-Phase Epitaxy of c-Plane AlGaN Layers on Patterned Sapphire Substrates

Author: Richter E.   Fleischmann S.   Goran D.   Hagedorn S.   John W.   Mogilatenko A.   Prasai D.   Zeimer U.   Weyers M.   Tränkle G.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.43, Iss.4, 2014-04, pp. : 814-818

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