Characterization of Threading Dislocations in PVT-Grown AlN Substrates via x-Ray Topography and Ray Tracing Simulation

Author: Zhou Tianyi   Raghothamachar Balaji   Wu Fangzhen   Dalmau Rafael   Moody Baxter   Craft Spalding   Schlesser Raoul   Dudley Michael   Sitar Zlatko  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.43, Iss.4, 2014-04, pp. : 838-842

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