Design principle of micromechanical probe with an electrostatic actuator for friction force microscopy

Author： Fukuzawa Kenji   Tsuji Hiroaki   Hamaoka Satoshi   Shikida Mitsuhiro   Itoh Shintaro   Zhang Hedong  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.19, Iss.9-10, 2013-09, pp. : 1567-1572

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