Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Grenoble, France, 24–26 April 2013

Author: Schmid Ulrich   Becker Thomas   Michel Bernd  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 521-521

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