Fabrication of nanopatterned sapphire substrates by annealing of patterned Al thin films by Laser Interference Lithography

Author： Cui Lin   Wang Gui-Gen   Zhang Hua-Yu   Han Jie-Cai   Kuang Xu-Ping   Tian Ji-Li   Sun Rui  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.115, Iss.1, 2014-04, pp. : 159-165

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