Study of the sensitivity and resonant frequency of the torsional modes of an AFM cantilever with a sidewall probe based on a nonlocal elasticity theory

Publisher： John Wiley & Sons Inc

E-ISSN： 1097-0029|78|5|408-415

ISSN： 1059-910x

Source： MICROSCOPY RESEARCH AND TECHNIQUE, Vol.78, Iss.5, 2015-05, pp. : 408-415

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