Effects of electron beam irradiation followed by thermal chlorine etching on InAs substrate

Author： Akamatsu B.   Henoc P.   Miya S.   Sakaki H.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|2|2|151-155

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.2, Iss.2, 2010-03, pp. : 151-155

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