Silicon technology for optical MEMS

Author： Moore D. F.   Syms R. R.A.  

Publisher： Edp Sciences

E-ISSN： 1432-1092|34|1|5-8

ISSN： 0531-7479

Source： EPN Europhysics news, Vol.34, Iss.1, 2010-03, pp. : 5-8

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