Control of gas-phase nucleation and flow visualization in a special cold wall CVD reactor

Author: Bisch C.   Llauro G.   Wang Y. B.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|3|1|41-47

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.3, Iss.1, 2010-03, pp. : 41-47

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Abstract