Thermodynamical study of the thermal nitridation for the system NH3/monocristalline Si

Author: Sassi Z.   Bureau J. C.   Chafik K.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|7|3|207-216

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.7, Iss.3, 2010-03, pp. : 207-216

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Abstract