Effect of the hydrogen dilution on the local microstructure in hydrogenated amorphous silicon films deposited by radiofrequency magnetron sputtering

Author: Daouahi M.   Zellama K.   Bouchriha H.   Elkaïm P.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|10|3|185-191

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.10, Iss.3, 2010-03, pp. : 185-191

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