Influence of particulates generated in a CH₄ low pressure radiofrequency discharge on dcnegative self bias voltage

Author： Massereau-Guilbaud V. Géraud-Grenier I. Plain A.

E-ISSN： 1286-0050|11|1|71-76

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.11, Iss.1, 2010-03, pp. : 71-76

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