Simultaneous measurement of film and substrate optical parameters from multiple sample single wavelengthellipsometric data

Author: Easwarakhanthan T.   Alnot P.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|6|3|285-292

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.6, Iss.3, 2010-03, pp. : 285-292

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