Characterization of SOI wafers by synchrotron X-ray topography

Author： Shimura T.   Fukuda K.   Yasutake K.   Umeno M.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|27|1-3|439-442

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 439-442

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