Defects in Semiconductors 18

Author: Suezawa Masashi; Katayama-Yoshida Hiroshi  

Publisher: Trans Tech Publications‎

Publication year: 1995

E-ISBN: 9783035705027

P-ISBN(Paperback): 9780878497164

Subject: TB3 Engineering Materials

Keyword: 工程材料学

Language: ENG

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Description

The study of defects in semiconductors has never been independent of the progress in semiconductor technology. With rapid development in semiconductor device technology, novel types of defects as well as very peculiar behavior of defects in semiconductors have been found one after another. New subjects in the basic study of defects have often been arisen from experiences in the practical field. Great progress has also been achieved in device production technology on the basis of the knowledge clarified in the basic field. The present publication presents a very comprehensive array of subjects, ranging from basic aspects of defect properties to practically important phenomena related to device production engineering. Among them, hydrogen-related problems, defects and impurities in GaN and related widegap semiconductors and grown defects in Czochralski-grown silicon may be regarded as highlights.

Chapter

The Role of Point Defects in Non-Stoichiometric III-V Compounds

Intrinsic Acceptors in Semi-Insulating Galliumarsenide Studied by Positron Annihilation and ODMR

Bound Exciton Spectra in Semi-Insulating GaAs

Oscillations in PLE Spectra of Li Passivated GaAs, Related to Interstitial Li Donors

Magneto-Optical and Odendor Investigations of the Substitutional Oxygen Defect in Galliumarsenide

Identification of Phonon Scattering Resonances with Defects in Gallium Arsenide

Photoluminescence of Germanium Doped Gallium Arsenide

Effect of Donor Nature on Behavior of Photoluminescence of the Gallium Vacancy - Shallow Donor Complexes in n-Type GaAs under Uniaxial Pressure

Structure of the 0.95 eV Photoluminescence Centers in n-Type GaAs

Effects of Activation Annealing on Thermally Stimulated Current in Semi-Insulating LEC GaAs Substrates

Arsenic-Antisite-Related Defects in GaAs Grown at Low Temperature: Charaterization of Localized States

Generation of EL2- Level Upon Rapid Thermal Annealing in Low-Temperature GaAs Layers Grown by MBE

Thermal and Optical Emission Processes of Electrons and Holes from EL2 in N- and P-Type GaAs

Studies of Deep Levels in n-GaAs by SADLTS

Trends in the Metastability of DX-Centers

Carrier Concentrations Saturation in n Type AlxGa1-xAs

Doping Puzzles in II-VI and III-V Semiconductors

Theoretical Study on Hole Compensation Mechanism: - Stability of Two Nitrogen Atoms at SE Substitutional Site of ZNSE -

Acceptor Compensation in Nitrogen Doped Zinc Selenide

Nitrogen-Doping Efficiency in ZnSe and ZnTe

Doping of ZnSe, ZnTe, and CdTe with Group V Elements

Lattice Sites of Ion Implanted Li in Zn-Rich ZnSe

Intrinsic Defects in ZnSe, ZnTe, and CdS Doped with Li

The Electronic Structure of Deep Donors and the Nature of the Anion Vacancy in II-VI Compound Semiconductors

Studies of Defects in Electron and Proton Irradiated ZnO by Positron Annihilation

Photoluminescence of Bulk Si-Ge Single Crystals

Dopant Diffusion in Strained and Relaxed Si1-xGex

In Situ Phosphorus Doping of Si and Si1-xGex Epitaxial Layers by RTP/VLP-CVD

Electrical Transport in SixGe1-x Bulk Alloys

Electron Paramagnetic Resonance of Phosphorus, Platinum, and Iron in Float Zone Si1-x Gex Crystals

Relaxation-Induced Deep Levels in SiGe/Si Heteroepitaxial Films

Irradiation Induced Lattice Defects in Si1-xGex Epitaxial Devices

Photoluminescence of Deformed Si-Ge Alloy

Influence of Cu Contamination and Hydrogenation on Recombination Activity of Misfit Dislocations in SiGe/Si Epilayers

An Electron Paramagnetic Resonance Study of Defects in Semiconducting Iron Disilicide

DX Centres Versus Shallow D-Centres in AIGaAs Based Quantum Wells

Extrinsic Self-Trapping of an Electron in Quantum-Well Structures

Carbon Delta-Doping In GaAs and AlAs

Theory of Si δ-Doped GaAs

Metastability and Electronic Structure of Periodically n-Type and p-Type δ-Doped Layer in GaAs

Infrared and Raman Studies of Si Delta-Doped (100) GaAs Grown by MBE at 400°C on c(4x4) Surfaces

Saturation of Luminescence Quenching Due to Nonradiative Centers in a GaAs/AlGaAs Quantum Well

Defect Induced Electron Transport Trough Semiconductor Barriers

Correlated Charged Donors in GaAs/AlGaAs Quantum Well. Quantum- and Mobility-Scattering Times

Non-Radiative Recombination in Irradiated GaAs/AlGaAs Multiple Quantum Wells

Defect Related Recombination Processes in II-VI Quantum Wells

Magnetoelectronic States in Semiconductor / Antiferromagnet Superlattices

Shallow and Deep Centers in Heavily Doped Silicon Quantum Wells

Important Nonradiative Grown-In Defects in MBE-Grown Si and SiGe/Si Heterostructures

Defect Formation and Recombination Processes in p-Type Modulation-Doped Si Epilayers

Profiling the Deep Levels inSiGe/Si Microstructure by Small-Pulse Deep Level Transient Spectroscopy

Multiphonon Carrier Emission and Capture by Defects in Nanostructures

Adsorption of Antimony on Si(113) Surfaces: Ab-Initio Calculations and STM Investigations

Enhanced Impurity Solubility and Diffusion Near Surfaces

A Correlation between Compositional Fluctuations and Surface Undulations in Strained Layer Epitaxy

Si/Ge Ordered Interface: Structure and Formation Mechanism

Spin Dependent Recombination and EPR of Surface Paramagnetic Centers in Crystalline and Porous Silicon

Variation of 2DEG-Properties on Hetrointerface Caused by the Surface Defects Recharging

Stucture of the Pb Center: Endor Investigation

High Quality GaAs on Si Grown by CBE

Control of Defects in GaAs/GaInP Interface Grown by MOVPE

Ab Initio Study of Cl Impurity at GaAs Surfaces

Influence of Dislocations on the Transport Properties of Two Dimensional Electron Gas in the Quantum Regim

High-Performance Al(Ga)As/GaAs Resonant Tunneling Diodes Achieved by the Control of Structural Defects at the Interface

Strain Characterization of Hg1-xFexSe-Layers by Electron Spin Resonance

Photoreflectance, Reflectivity and Photoluminescence of MOVPE Grown ZnSe/GaAs Epilayers and ZnSeS/ZnSe Superlattices

Photoinduced Defects in CdS-Doped Glasses

Electronic Structure of Erbium Centers in Silicon

Erbium in Silicon: A Defect System for Optoelectronic Intergrated Ciricuits

Excitation of Rare Earths in Semiconductors by the Excitonic Auger Recombination

Optical and Electrical Properties of Si:Er Light-Emitting Structures

Light Emission from Er-Implanted Silicon Using Anodization

Erbium Related Centers in CZ-Silicon

Electrically Active Centers in Silicon Doped with Erbium

Erbium Doping to P-Based III-V Semiconductors by OMVPE with TBP as a Non-Toxic P Source

Total Energy Calculation for Er Impurity in GaAs

Estimation of Rare-Earth Energy Levels in the Bandgap of Semiconductors

Characteristics of Er-Oxygen Complex Centers in GaAs

Pressure-Induced Increase of the Intra-4f Luminescence of GaAs:Er,O at Room Temperature

Relaxation of Yb 4f-Shell in In(P,As) Alloys

The Importance of Auger Effect on the Efficiency of Er-Related Luminescence in InP:Er

Investigation of Er-Related Centers in Doped GaP

High Resolution DLTS Studies of Transition-Metal-Related Defects in Silicon

Ab-Initio Total Energy Calculations and the Hyperfine Interaction of Interstitial Iron in Silicon

Substitutional Transition Metal Defects in Silicon Grown-In by the Float Zone Technique

Interaction of Iron Donor with Transition-Metal Impurities in Silicon

Lithium-Gold-Related Photoluminescence in n-Type Silicon

Copper Species in Ultra-Pure Germanium Crystals

Zeeman Spectroscopy and Crystal-Field Model of Neutral Vandium in 6H-Silicon Carbide

Electronic Properties of GaAs Doped with Copper

Zeeman Spectroscopy of Transition Metals in Hexagonal GaN

Paramagnetic Resonance of the Neutral Maganese Acceptor in GaP

Piezo-Spectroscopic Study of the V3+ Photoluminescence in GaP:V:S

Electron Paramagnetic Resonance of the Mn-Impurity in ZnS Nanocrystals

Zeeman Splitting and Isotope Shift of Optical Transitions at Ni2+ Centers in Cubic ZnS

Energy States of Ni and Band Offsets in Zn1-xCdxSe(Ni) and ZnSxSe1-x(Ni) Alloys

Intermdiately Bound Excitons in Wurtzit Type Semiconducturs Doped with Transition Metal Impurities

Iron and Nickel as Centers of Nonradiative Recombination in ZnS and ZnSe

Nonlinear Zeeman Behaviour of Copper Centers in ZnS and CdS

Electron Paramagnetic Resonance and Optical Studies of Vanadium-Doped ZnTe

The Titanium and Vanadium Donor in CdTe

Peculiarities of Interstitial Carbon and Di-Carbon Defects in Si

The NNO Defect in Silicon

Generation of Deep Level by Nitrogen Diffusion in Si

A First-Priciples Study of Carbon Impurities in GaAs and InAs

Novel Properties of Hydrogen-Containing Complexes Revealed by their Hydrogen Vibrations

Hydrogen Incorporation and Interaction with Impurities and Defects in Silicon Investigated by Photoluminescence Spectroscopy

A Hydrogen-Related Defect in Polycrystalline CVD Diamond

Dynamics of Hydrogen in Si and GaAs: Results from Muonium Experiments

Acceptor and Donor Neutralization by Hydrogen in Bulk 6H-SiC

Hydrogen States and Passivation in Silicon

Endor Identification of a Hydrogen-Passivated Thermal Donor

Hydrogen Passivation of the Sulfur Double Donor in Silicon Investigated by EPR and ENDOR

Hydrogen Passivation of Iron-Related Hole Traps in Silicon

Boron Neutralization in Epitaxial Si Films Grown by Photo-CVD at Very Low Temperature (≦ 200°C)

Screening Effect of Binding of P-Si-H Complex in Silicon

The H2* Defect in Crystalline Germanium

A Theoretical Study of the B-H and Al-H Complexes in Si

Calculations of the Neutral and Charged States of the {H,C} Pair in Silicon

Structural and Electronic Properties of Carbon-Hydrogen Complex in Silicon

Stability and Defect Reaction of Two Hydrogen-Carbon Complexes in Silicon

Carbon-Hydrogen Deep Level Luminescence Centre in Silicon Responsible for the T-Line

Optical Absorption due to Vibration of Hydrogen-Oxygen Pairs in Silicon

Theory of the NiH2 Complex in Si and the CuH2 Complex in GaAs

Hydrogen Induced Defects in Cobalt Doped Silicon

H Interacting with Intrinsic Defects in Si

Formation of Hydrogen-Oxygen-Vacancy Complexes in Silicon

Metastability and Negative-U Properties for Hydrogen-Related Radiation-Induced Defect in Silicon

Interstitial Hydrogen and the Dissociation of C-H Defects in GaAs

Hydrogen Induced Degradation in Heavily Carbon-Doped GaAs Diodes

Acceptor-Hydrogen Complexes in InAs

Vacancy- and Acceptor- H Complxes in Inp

Investigation of the Manganese-Hydrogen Complex in Inp

First-Principles Calculation on Hydrogen Passivation Mechanism in Mg Doped GaN

Acceptor-Hydrogen Interaction in Ternary III-V Semiconductors

Upconversion Induced by Deep Defects in GaAs

Negative Effective-U and positive Effective-U Nature of the Bistable Dangling-Bonds in a-Si, a-Si:H and c-Si Studied by ab Initio Molecular-Dynamics Simulation

New Bistable Oxygen-Related Complex in Silicon

Theoretical Modelling of Donor Metastable States in n-Type Gallium Arsenide

Donor Metastable States and the Polaron Effect in n-Type Gallium Arsenide

A New Type of Metastability due to Donors in GaAs

Nonradiative Investigations of Photoquenching and Recovery of EL2 Defect Levels in Si-GaAs

The Role of a 70-80 me V Acceptor in the Photoquenching of EL'

Holes Induced by Strong Near Band Gap Light in GaAs:O. EL2 Related?

Metastable Photogenerated Effects in Low Resistivity GaAs

Introduction of Metastable Vacancy Defects in Electron Irradiated Semi-Insulating GaAs

Arsenic Antisite-Arsenic Vacancy Complex and Gallium Vacancy in GaAs: A Kind of Bistability Pair of Intrinsic Defects?

Electronic Properties and Introduction Kinetics of a Metastable Radiation Induced Defect in n-GaAs

Local Structure of the DX Center in AlGaAs: Results from Positron Spectroscopy

Direct Experimental Evidence of Autolocalization Nature of DX-Centers

Magneto-Optical and EPR Investigation of Ionized DX Centers in Te-Doped AlxGa1-xAs

Silicon-Related Local Vibrational Mode Absorption in Bulk AlGaAs

A Bistable Defect in Si-Doped Al0.3Ga0.7As

Use of Bistable Centers in CdF2 in Holographic Recording

Structural Study of Degraded II-VI Blue-Light Emitters

Evidence for High Vacancy Concentrations in Heavily Doped N-Type Silicon from Mossbauer Experiments

Analysis of the Recombination-Active Region Around Extended Defects in Silicon

Photoluminescence of Ring-Distribution of Oxygen Precipitates in Czochralski Silicon

Positron Lifetime in Si Multivacancies

Frenkel Defects in Low Temperature e-- Irradiated Ge and Si Investigated by X-Ray Diffraction

On the Behaviour of the Divacancy in Silicon during Anneals between 200 and 350°C.

Defects in NTD MCZ Si Doped with Magnesium

Irradiation Temperature Dependence of Residual Defects in 17MeV-Proton Bombarded Silicon

Study of Defect Behavior in Ion-Implanted Si Wafers by Slow Positron Annihilation Spectroscopy

Extended Defect Formation in Silicon and Germanium Induced by Light Gas Ion Irradiation Studied with Transmission Electron Microscopy

A Positron Lifetime Study of Defects in Plastically Deformed Silicon

Increase of Electrical Activity of Dislocations in Si during Plastic Deformation

Electronic States Associated with Straight Dislocations in P-Type SiliconStudied by Means of Electric-Dipole Spin Resonance

Energy States of Deformation-Induced Dislocations in Silicon Crystals

Cathodoluminescence Study on Dislocation-Related Luminescence in Silicon

Precipitation of Cu, Ni and Fe on Frank-Type Partial Dislocations in Czochralski-Grown Silicon

Effect of Transition Metal Impurities on the Photoluminescence of Deformed Si Crystal

New Effect of Interaction between Moving Dislocation and Point Defects in Silicon

Computer Simulation Study on Dislocation Motion in Semiconductors

Scratch-Related Effects on Silicon Surface

Study of Electron Irradiation-Induced Defects of 3c-SiC and Diamond by Ultra-High Voltage Electron Microscopy

Study on the Irradiation Induced Defects in 6H-SiC

Vacancy Type Defects inGaAs After Electron Irradiation Studied by Positron Lifetime Spectroscopy

Ga-Vacancies and AsGa-Antisites in Electron Irradiated GaAs

Frenkel Pairs and PIn Antisites in Low Temperature Electron Irradiated InP

Generation of Point Defects during Plastic Deformation of InP

Category II and Category III Defects in 200 KEV Fe Implanted InP

Clustering Process of Point Defects in GaP Studied by Transmission Electron Microscopy

Hg Vacancies in Hg1-xCdxTe Studied by Positron Annihilation

ESR Study of a-Ge1-xNx Prepared by Magnetron Sputtering

First Principles Investigation of Vacancy Oxygen Defects in Si

Oxygen Complexing with Group II Impurities in Silicon

Models of Oxygen Loss and Thermal Donor Formation in Silicon by the Clustering of Rapidly Diffusing Oxygen Dimers

Effect of Carbon on Thermal Double Donor Formation in Silicon

Anomalous Fast Annihilation of Thermal Donors in Carbon-Rich Silicon

Ab-Initio Total Energy Calculation and the Hyperfine Interactions of Iron-Acceptor Pairs in Silicon

The Structure and Bonding of Iron-Acceptor Pairs in Silicon

Ab Initio Study on Fe-Acceptor Pairing in Silicon

Photo-Induced Iron Atom Motion of Iron-Acceptor Pairs in Silicon

Recombination-Enhanced Migration of Interstitial Iron in Silicon

The Origin of the Low-Spin Ground State for Trigonal Fei-AuSi and Fei-AgSi Pairs in Silicon

The Atomic Stucture of Mn4 Clusters in Silicon

Perturbed Angular Correlation Study of Impurities Interaction in Si

TDS and RB Studies of Ar Implanted to Si

Reactions between Point Defects in Silicon Doped with Germanium

Influence of Intrinsic Elastic Stresses on the Interaction between Point Defects in Si

Surface Recombination in Semiconductors

Reactivation Kinetics of Lithium-Passivated Acceptors inGaAs

Reactivation of Si Donors and Zn Acceptors in Plasma-Irradiated GaAs by Reverse Bias Annealing

Mechanism of Deep Penetration of Plasma-Induced Defects inGaAs: Minority Carrier Injection Effect

Impurity-Defect Complexes in Neutron Transmutation Doped Gallium Arsenide and Germanium Crystals

PAC-Investigations of the Donor-Defect Interaction in III-V Compound Semiconductors with the Probe 77Br(77Se)

Scanning Tunneling Spectroscopic Studies of GaAs Doped with Si

Thermal Precipitation of Excess Arsenic on Dislocations in LEC Grwon GaAs Crystal

Optically Induced Anneal of GaAs and AlGaAs Layers

Electron-Irradiaton Induced Defects in Fe-Doped Semi-Insulating InP

Deformation-Induced Defects in GaSb

Damages in AlGaAs/GaAs Heterostructures Induced by KeV-Electron-Beam Irradiation

TEM Investigation of Point Defect Interactions in II-VI Compounds

Athermal Motion of Donors under Ultrasound in CdS Crystals

Chemical Identification on the Atomic Scale in MBE-Grown III-V Alloy Semiconductors

Positron-Annihilation 2D-Acar Study of Divacancy and Vacancy-Oxygen Pairs in Si

Defect Studies with Isotopically Designed Semiconductors

The Chemical Identification of Defect Impurities Using Radioactive Isotopes

Radioactive Isotopes in Photoluminescence Experiemts: Identification of Defects Levels

Electrical Detection of Electron Paramagnetic Resonance: Studies of the Mechanism of the Spin-Dependent Recombination Process

The Bending of Si Crystals as a Means to Determine the Orientation of Defects in Si

Novel Very Slow Photoluminescence Processes at Transition Metal Ions in III-V Semiconductors

Frenkel Pairs in INSB Induced by Neutrino Recoil and Observed by Mössbauer Spectroscopy

High Sensitivity Detection of Silicon Surface Reactions by Photoconductance Decay

New Experimental Methods of Detection the Paramagnetic Recombination Centers in Silicon P-N Junctions and Diodes

Poole-Frenkel Ionization of Ge:Hg in Terahertz Electromagnetic Fields

Raman Image Study of Defects in Ion-Implanted and Post-Annealed Silicon

Determination of High Relative Deep Level Concentrations in DLTS

Generation of Ultra-High Acceleration Field for New Extreme Condition Science

Phonon Spectroscopy of Low-Energy Excitations of Defects in Semiconductors

Local Vibrational Modes of 3d Elements in Wurtzite Type ZnO and GaN Crystals

Anharmonicity of The CAsLocal Oscillator in Gallium Arsenide

Calculation of Local Vibrational Modes at Point Defects in Semiconductors

The Migration of Carbon and Self Interstitials in Silicon

Anomalous Diffusion of Phosphorus in Silicon by Pair Diffusion Model and Decrease in Quasi Vacancy Formation Energy

Electric-Dipole Spin Resonance of Defects Correlated with the Diffusion of ZN Into SI

Enhanced Diffusion of Impurities into Solids by Electron Beam Doping

Interstitials in Silicon Produced by Electron Beam Doping (Superdiffusion)

Electron Energy Dependennce of Impurity Concentrations in Semiconductors by Electron Beam Doping (Superdiffusion)

Surface Diffusion of Atoms by Electron Beam Doping (Superdiffusion)

Dopant Diffusion and Stacking Fault in Silicon during Thermal Oxidation

Influence of Simultaneously Implanted As+ Ions on Diffusivity and Activation Efficiency of B Atoms Implanted into Silicon

Effects of Background Doping Level on ZN Diffusion in GaAs/AlGaAs Multiple-Quantum-Well Structures

Study of The Compensating Centres in GaAs:Te by Positron Annihilation

Time-of-Flight in Lithium-Compensated GaAS

The Influence of the Zinc Concentration on Defect Characteristics of InP

Influence of Intrinsic Defects on the Electronic Structure of Non-Stoichiometric CuInS2 Chalcopyrite Semiconductors

Defects in Porous Silicon: A Study with Optical and Spin Resonance Methodes

Oxygen Related Defect Centers: the Source of Room Temperature Red Photoluminescence in As-Made and Oxidized Porous Silicon

Review of the Influence of Micro Crystal Defects in Silicon Single Crystals on Gate Oxide Integrity

Fundamentals of Point Defect Aggregation and Dissolution Phenomena of Crystal Originated Defects in Czochralski Silicon

Nature of D-Defect in CZ Silicon: D-Defect Dissolution and D-Defect Related T.D.D.B

Relationship between Grown-In Defects and Thermal History during CZ Si Crystal Growth

Growth Parameters Determining the Type of Grown-In Defects in Czockralski Silicon Crystals

Effect of Magnetic Field and Heat Treatment on the Grown-in Defects in MCZ Si Single Crystals

Annealing Behavior of a Ligth ScatteringTomography Detected Defect near the Surface of Si Wafers

Influence of Point Defect Concentration in Growing CZ-SI on the Formation Temperature of the Defects Affecting Gate Oxide Integrity

Genration of Oxidation Induced Stacking Faults in CZ Silicon Wafers

Relation between Minute Lattice Strain and Anomalous Oxygen Precipitation in a Czochralski-Grown Silicon Crystal

Photoluminescence Due To Oxygen Precipitates Distinguished from the D Lines in Annealed Si

Lattice Defects in High Quality As-Grown CZ Silicon, Studied with Ligth Scattering and Preferential Etching Techniques

Microdefects in Nitrogen Doped FZ Silicon Revealed by Li+ Drifting

Influence of Al Doping on Deep Levels in MBE GaAs

Deep Donor - Acceptor Correlations in Low Temperature GaAs

Dislocation Reduction of GaAs and AIGaAs on Si Substrate for High Efficiency Solar Cell

Spatial Distribution of Microdefects around Dislocations in Si-Doped GaAs

Study of the Dislocation Atmospheres in N-Type GaAs by DSL Photoetching, EBIC and Microraman Measurements

Study of Gallium and Antimony Cluster Formation în GaSb Bulk Crystals Grown from Nonstoichiometric Melts

TEM Evaluation of Ordered and Modulated Structures in MBE-Grown InAlAs Crystals on (110)InP

SF6/02 and CF4/02 Reactive-Ion-Etching-Induced Defects in Silicon Studied by Photoluminescence Spectroscopy: Role of Oxygen

Measurements of Polishing-Induced Residual Damages in Silicon Wafers Using Noncontact Photoconductivity Amplitude Technique

Lifetime Identification of Thermal Oxidation Process Induced Contamination in Silicon Wafers

Transmission Electron Microscopy of LatticeDefects in CZ-Silicon Wafer Formed by Two-Stage Annealing

Rhombic Aggregation of Dislocations in CZ-Si Crystal

Study of Near-Surface Microdefects in Czochralski-Si Wafers After a CMOS Thermal Process

Subsurface Damage in Single Diamond Tool Machined SI Wafers

Interface Defects of Bonded Silicon Wafers

Direct Bonding of Silicon Wafers with Grooved Surfaces: Characterization of Defects and Application to High Power Devices

Oxygen Precipitation in CZ Silicon Crystals Contaminated with Iron

Evaluation Method of Precipitated Oxygen Concentration in Low Resistivity Silicon Wafers Using X-Ray Diffration

Precipitates in Antimony Implanted Silicon

Secondary Defects and Deep Levels in N-Si Induced by High Energy P Ion Implantation

High Energy Si, Zn and Ga Ion Implantation into GaAs on Si

Local Structure Analysis around Arsenic Implanted into Silicon by XAFS Technique

Effects of Si3N4 Films on Diffusion of Boron and Extended Defects in Silicon during Post-Implantation Annealing

Photoluminescence Defect Diagnostics in Poly-Si Thin Films

DLTS of Polysilicon Emitter Solar Cells

Photoluminescence Study on Point Defects in SIMOX Buried SiO2 Film

Spin-Dependent Transport in SiC and III-V Semiconductor Devices

Room Temperature Defect Etching of III-V Compounds and Alloys Grown on Si Substate Using Hydrogen Fluoride and Nitric Acid

ODMR Investigation of Near-Surface Damage Induced by Dry-Etching Process Using GaAs/AlAs Quantum Well Structures

Novel Technique for Reliable AlGaAs/GaAs Light Emitting Diodes on Si Using GaAs Islands Active Regions

Thermal and Athermal Migration of Ion-Irradiation Defects in Al0.3Ga0.7As/GaAs Heterostructures

Characterization of Mg+F, Mg+Ar Dual Ion Implanted AlxGa1-xAs(0≤x≤0.75) Layers

Atomic-Scale Studies of Point Defects in Compound Semiconductors by Scannig Tunneling Microscopy

Electrical and Defect Characterization of Sputter Deposited Au and Cr Schottky Barrier Diodes on GaAs

Optical and Electrical Characterisation of He Plasma Sputtered n-GaAs

Contamination and Cleaning of GaAs-(100) Surfaces

Characterization of Electron Traps in n-InP Induced by Hydrogen Plasma

Gettering of Transition Metals in Multicrystalline Silicon

Substitutional Gettering of Platinum by Diffusion into Ion-Beam Damaged Silicon

Gettering of Iron Using Electrically Inactive Boron Doped Layer

Ab Initio Calculation for G-Values of ESR Centers in a-Si:H

Keyword Index

Author Index

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