Description
This collection aims to address the fundamental aspects, as well as the technological problems, which are associated with defects in electronic materials and devices.
The volume comprises 93 contributions; among them, 14 invited papers, from more than 20 different countries. The invited papers, submitted by internationally recognized experts in the field, review the state-of-the-art and likely future trends in their respective research field. Upon comparing this volume with previous volumes, it is clearly seen that defect engineering in photovoltaics is becoming a topic of ever-increasing interest.The collection is divided into the chapters: - Multi-crystalline silicon for solar cells, - Advanced semiconductor materials: Strained Si, SOI, SiGe, SiC, - Impurities (oxygen, carbon, nitrogen, metals) and point defects in Si and SiGe, - Modeling and simulation of growth, gettering and characterization, - Defect aspects and defect engineering, - Gettering and hydrogen passivation, - Defect and impurity characterization, - Nanostructures and new devices, - Silicon-based opto-electronics and defect luminescence.
Chapter
An Investigation into Fracture of Multi-Crystalline Silicon
II. Advanced Semiconductor Materials: Strained Si, SOI, SiGe, SiC
Novel Trends in SOI Technology for CMOS Applications
Advanced Si-based Semiconductors for Energy and Photonic Applications
Si Wafer Bonding: Structural Features of the Interface
Buried Insulating Layer Formation in Cz Si Wafers after Helium Implantation, Nitrogen Plasma Treatment and Annealing
Growth of Heavily Phosphorus-Doped (111) Silicon Crystals
Semi-Insulating Silicon for Microwave Devices
III. Impurities (Oxygen, Carbon, Nitrogen, Metals) and Point Defects in Si and SiGe
Can Impurities be Beneficial to Photovoltaics?
Properties of Fast-Diffusing Oxygen Species in Silicon Deduced from the Generation Kinetics of Thermal Donors
The Production of Vacancy-Oxygen Defects in Electron-Irradiated Cz-Si Initially Treated at High Temperatures and High Pressures
Divacancy-Oxygen and Trivacancy-Oxygen Complexes in Silicon: Local Vibrational Mode Studies
Low-Temperature Elastic Softening due to Vacancies in Boron-Doped FZ Silicon Crystals
Vacancies and Self-Interstitials Dynamics in Silicon Wafers
Interaction of Point Defects with Impurities in the Si-SiO2 System and its Influence on the Properties of the Interface
Anomalous Out-Diffusion Profiles of Nitrogen in Silicon
DLTS Studies of Carbon Related Complexes in Irradiated N- and P-Silicon
Copper In-Depth Distribution in Hydrogen Implanted Cz Si Wafers Subjected to Two-Step Annealing
Radiation Defects in Silicon: Effect of Contamination by Platinum Atoms
Review of Stress Effects on Dopant Solubility in Silicon and Silicon-Germanium Layers
Oxygen Diffusion in Si1-xGex Alloys
The Effect of Germanium Doping on the Production of Carbon–Related Defects in Electron-Irradiated Czochralski Silicon
IV. Modeling and Simulation of Growth, Gettering and Characterization
Numerical Analysis of mc-Si Crystal Growth
Molecular Simulation on Interfacial Structure and Gettering Efficiency of Si (110)/(100) Directly Bonded Hybrid Crystal Orientation Substrates
Optimization of Silicon Ingot Quality by the Numerical Prediction of Bulk Crystal Defects
Rate Equation Modeling, Ab Initio Calculation, and High Sensitive FTIR Investigations of the Early Stages of Oxide Precipitation in Vacancy-Rich CZ Silicon
Thermal Optimization of Cz Silicon Single Crystal Growth
Simulation of Iron Distribution after Crystallization of mc Silicon
Comparison of Efficiency and Kinetics of Phosphorus-Diffusion and Aluminum Gettering of Metal Impurities in Silicon: a Simulation study
Effect of Growth Conditions and Catalyst Material on Nanowhisker Morphology: Monte Carlo Simulation
Versatile Simulation Tool and Novel Measurement Method for Electrical Characterization of Semiconductors
Simulation of XBIC Contrast of Precipitates in Si
V. Defect Aspects and Defect Engineering
Dislocation Nucleation in Heteroepitaxial Semiconducting Films
Impurity Engineering of Czochralski Silicon
The Role of the Interstitial Oxygen in the Recovery and Evolution of the Boron Implantation Damage
Oxygen Precipitation in Conventional and Nitrogen Co-Doped Heavily Arsenic-Doped Czochralski Silicon Crystals: Oswald Ripening
Study of the Mechanisms of Oxygen Precipitation in RTA Annealed Cz-Si Wafers
Electronic States of Oxygen-Free Dislocation Networks Produced by Direct Bonding of Silicon Wafers
Dislocation States and Deformation-Induced Point Defects in Plastically Deformed Germanium
Defect Generation during Plastic Deformation of Si-Rich Cz-Grown SiGe Crystals
Formation of Radiation-Induced Defects in Si Crystals Irradiated with Electrons at Elevated Temperatures
Role of Ion Irradiation Induced Lattice Defects on Nanoscale Capacitive Behavior of Graphene
Boron and Phosphorus Implantation Induced Electrically Active Defects in p-Type Silicon
Accumulation of Hydrogen within Implantation-Damaged Areas in Processed Si:N and Si:O
Influence of Hydrogen on the Structural Stability of Annealed Ultrathin Si/Ge Amorphous Layers
Demonstration of Defect-Induced Limitations on the Properties of Au/3C-SiC Schottky Barrier Diodes
Suppression of Pores Formation on a Surface of p-Si by Laser Radiation
VI. Gettering and Hydrogen Passivation
Hydrogenation in Crystalline Silicon Materials for Photovoltaic Application
Hydrogen-Induced Passivation of Grain-Boundary Defects in Polycrystalline Silicon
Bulk Passivation of Defects in Multi-Crystalline Silicon Solar Cells by a-SiNx:H Layers
Passivation of Si Surfaces Investigated by In Situ Photoluminescence Techniques
Gettering Efficiency of Si (110)/(100) Directly Bonded Hybrid Crystal Orientation Substrates
Trans-RP Gettering and Out-Diffusion of Oxygen Implanted into Highly B-Doped Silicon
Iron Gettering in CZ Silicon during the Industrial Solar Cell Process
Study of Internal versus External Gettering of Iron during Slow Cooling Processes for Silicon Solar Cell Fabrication
Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon
Far-Action Defects Formation and Gettering in 6H-SiC Lely Crystals Irradiated by Bi
VII. Defect and Impurity Characterization
Quantitative Iron Concentration Imaging
EBIC Investigation of the Influence of Hydrogen Passivation on Thin-Film Polycrystalline Silicon Solar Cells Obtained by Aluminium Induced Crystallization and Epitaxy
Characterization of Thin Film Photovoltaic Material Using Photoluminescence and Raman Spectroscopy
Comparative Study of Electrical and Optical Properties of Plastically Deformed Silicon
Spatially Resolved Defect Analysis in Cz-Silicon after Copper-Nickel Co-Precipitation by Virtue of Light-Beam-Induced Current Measurements
In Situ Observation of Oxygen Precipitation in Silicon with High Energy X-Rays
Delineation of Microdefects in Silicon Substrates by Chromium-Free Preferential Etching Solutions and Laser Scattering Tomography
An Express Method for the Study of Planar Homogeneity of Diffusion Lenght in Multicrystalline Solar Silicon
Point Defects in γ-Irradiated Germanium: High- and Low- Momentum Positron Annihilation Study Before and After n-p-Conversion
Electron-Beam-Induced Current Study of Breakdown Behavior of High-K Gate MOSFETs
Characterization of Semiconductor Films Epitaxially Grown on Thin Metal Oxide Buffer Layers
SEM Characterization of Silicon Layers Grown on Carbon Foil
Investigation of the Mechanical Properties of Thin Films by Bulge Test
Defect Characterization of Poly-Ge and VFG-Grown Ge Material
Cathodoluminescence of SiO2/Si System
Correlation Study of Morphology, Electrical Activation and Contact formation of Ion Implanted 4H-SiC
VIII. Nanostructures and New Devices
Current Status of Graphene Transistors
Theoretical Study of Ionized Impurities in Silicon Nanowire MOS Transistors
Scaling in Quantum Transport in Silicon Nano-Transistors
Anisotropic Strain – Anisotropic Heating Engineering for Silicon Nanocrystals in SiO2
Silicon Cluster Aggregation in Silica Layers
Feedback Effect on the Self-Organized Nanostructures Formation on Silicon upon Femtosecond Laser Ablation
Confinement Levels in Passivated SiGe/Si Quantum Well Structures
IX. Silicon-Based Photonics and Defect Luminescence
Silicon Periodic Structures and their Liquid Crystal Composites
Dependence of Luminescence Properties of Bonded Si Wafers on Surface Orientation and Twist Angle.
D-Line Emission from Small Angle Grain Boundaries in Multicrystalline Si
Determination of the Origin of Dislocation Related Luminescence from Silicon Using Regular Dislocation Networks
Structural and Luminescent Properties of Implanted Silicon Layers with Dislocation-Related Luminescence
Optimization of the Luminescence Properties of Silicon Diodes Produced by Implantation and Annealing
Gettering and Defect Engineering in Semiconductor Technology XIII
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