Introductory Chapter: Introduction to Ion Implantation
( Ion Implantation - Research and Application )
Publication series ： Ion Implantation - Research and Application
Author： Ishaq Ahmad and Waheed Akram
Publisher： IntechOpen
Publication year： 2017
E-ISBN: INT6552868785
P-ISBN(Paperback): 9789535132370
P-ISBN(Hardback): 9789535132387
Subject： O414 Thermodynamics and Statistical Physics;TH Machinery and Instrument Industry
Keyword： Energy technology & engineering,热力学与统计物理学
Language： ENG
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Introductory Chapter: Introduction to Ion Implantation
Chapter