Description

To clarify their potential as atomic force microscope (AFM) memory media, the nanometer‐scale mechanical processing properties of untreated and fluorocarbon plasma‐treated polycarbonate samples were determined via the sliding of an AFM tip. The surface energy of the polycarbonate was reduced by the fluorocarbon plasma treatment, as well as the force necessary for processing. Nanometer‐scale precise processing of the polycarbonate was realized after the fluorocarbon plasma treatment, and the interval pitch in the formation of lines, spaces, and nanometer‐scale fine dots was minimized to 60 nm with these samples. The viscoelastic properties of the fluorinated polycarbonate were evaluated using an AFM in force modulation mode. The fluorocarbon plasma treatment reduced the friction force of the polycarbonate sample and improved its wear resistance, which caused the friction durability corresponding to the reliability of data reproduction to be markedly improved. These results show that high‐density recording can be realized by nanometer‐scale processing of fluorocarbon plasma‐treated polycarbonate samples.

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