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Publication series : Modern Technologies for Creating the Thin-film Systems and Coatings
Author: Chen-Chi Yang Ikai Lo Cheng-Hung Shih Chia-Hsuan Hu5
Publisher: IntechOpen
Publication year: 2017
E-ISBN: INT6332665812
P-ISBN(Paperback): 9789535130031
P-ISBN(Hardback): 9789535130048
Subject: Q Biological Sciences
Keyword: 生物科学
Language: ENG
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Growth and Characteristics of High-quality InN by Plasma- Assisted Molecular Beam Epitaxy
Description
The high-quality InN epifilms and InN microdisks have been grown with InGaN buffer layers at low temperatures by plasma-assisted molecular beam epitaxy. The samples were analyzed using X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, and photoluminescence. The characteristics of the InN epifilms and InN microdisks were studied, and the role of InGaN buffer was evaluated.
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