Fabrication of Three-Dimensional Concave or Convex Shell Structures with Shell Elements at Micrometer Resolution in SU-8
( Lab-on-a-Chip Fabrication and Application )
Publication series ： Lab-on-a-Chip Fabrication and Application
Author： Louis WY Liu Qingfeng Zhang and Yifan Chen
Publisher： IntechOpen
Publication year： 2016
E-ISBN: INT6147062405
P-ISBN(Paperback): 9789535124573
P-ISBN(Hardback): 9789535124580
Subject： O469 Condensed Matter Physics
Keyword： 凝聚态物理学
Language： ENG
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Fabrication of Three-Dimensional Concave or Convex Shell Structures with Shell Elements at Micrometer Resolution in SU-8
Description
This chapter presents a photo-lithographically-based technology for mass production of three-dimensional (3D) micro-structures with shell elements. In this technology, shell elements are photo-lithographically fabricated at micron or sub-micron resolution by illuminating with ultraviolet light radiating an ultraviolet light beam onto UV-opaque SU-8 monomer. The technology does not require any steps involving micro-injection molding or micro-stereolithography. Several prototypes have been fabricated to demonstrate the feasibility of this technology.
Chapter