Publication series : Updates in Advanced Lithography
Author:
Arnaud Spangenberg Nelly Hobeika Fabrice Stehlin Jean-PierreMalval
Publisher: IntechOpen
Publication year: 2013
E-ISBN: INT0334856165
P-ISBN(Paperback): 9789535111757
P-ISBN(Hardback): 9789535111757
Subject: O469 Condensed Matter Physics
Keyword: 凝聚态物理学
Language: ENG
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