Infrared Holography for Wavefront Reconstruction and Interferometric Metrology ( Advanced Holography - Metrology and Imaging )

Publication series ： Advanced Holography - Metrology and Imaging

Author： Sergio De Nicola Andrea Geltrude Massimiliano Locatelli Kais Al-Naimee

Publisher： IntechOpen‎

Publication year： 2011

E-ISBN: INT0102719827

P-ISBN(Paperback): 9789533077291

P-ISBN(Hardback): 9789533077291

Subject： TN4 microelectronics, integrated circuit (IC)

Keyword：微电子学、集成电路（IC）

Language： ENG

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Infrared Holography for Wavefront Reconstruction and Interferometric Metrology

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