Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication
( Ion Implantation )
Publication series ： Ion Implantation
Author： D. Rémiens D. Deresmes D. Troadec and J. Costecalde
Publisher： IntechOpen
Publication year： 2012
E-ISBN: INT0188134139
P-ISBN(Paperback): 9789535106340
P-ISBN(Hardback): 9789535106340
Subject： O414 Thermodynamics and Statistical Physics;TH Machinery and Instrument Industry
Keyword： Energy technology & engineering,热力学与统计物理学
Language： ENG
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Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication