Publication series : Optoelectronics - Materials and Techniques
Author: Nicolae Tomozeiu
Publisher: IntechOpen
Publication year: 2011
E-ISBN: INT0077920156
P-ISBN(Paperback): 9789533072760
P-ISBN(Hardback): 9789533072760
Subject: TN4 microelectronics, integrated circuit (IC)
Keyword: 微电子学、集成电路(IC)
Language: ENG
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Silicon Oxide (SiOx, 0<x<2): a Challenging Material for Optoelectronics