Design and Fabrication of a Novel MEMS Silicon Microphone
( Crystalline Silicon - Properties and Uses )
Publication series ： Crystalline Silicon - Properties and Uses
Author： Bahram Azizollah Ganji
Publisher： IntechOpen
Publication year： 2011
E-ISBN: INT0084421277
P-ISBN(Paperback): 9789533075877
P-ISBN(Hardback): 9789533075877
Subject： O7 Crystallography
Keyword： 晶体学
Language： ENG
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Design and Fabrication of a Novel MEMS Silicon Microphone