Nanolithography Study Using Scanning Probe Microscope
( Recent Advances in Nanofabrication Techniques and Applications )
Publication series ： Recent Advances in Nanofabrication Techniques and Applications
Author： S. Sadegh Hassani and H. R. Aghabozorg
Publisher： IntechOpen
Publication year： 2011
E-ISBN: INT0085920881
P-ISBN(Paperback): 9789533076027
P-ISBN(Hardback): 9789533076027
Subject： O469 Condensed Matter Physics
Keyword： 凝聚态物理学
Language： ENG
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Nanolithography Study Using Scanning Probe Microscope