Estimation of process parameter variations in a pre-defined process window using a Latin hypercube method

Author： Moshfegh R.   Nilsson L.   Larsson M.  

Publisher： Springer Publishing Company

ISSN： 1615-147X

Source： Structural and Multidisciplinary Optimization, Vol.35, Iss.6, 2008-06, pp. : 587-600

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